JPS6365250U - - Google Patents
Info
- Publication number
- JPS6365250U JPS6365250U JP15963686U JP15963686U JPS6365250U JP S6365250 U JPS6365250 U JP S6365250U JP 15963686 U JP15963686 U JP 15963686U JP 15963686 U JP15963686 U JP 15963686U JP S6365250 U JPS6365250 U JP S6365250U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- insulating film
- substrate
- semiconductor device
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000003990 capacitor Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
Landscapes
- Local Oxidation Of Silicon (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15963686U JPS6365250U (en]) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15963686U JPS6365250U (en]) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365250U true JPS6365250U (en]) | 1988-04-30 |
Family
ID=31084254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15963686U Pending JPS6365250U (en]) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365250U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS605074A (ja) * | 1983-06-22 | 1985-01-11 | 日本タングステン株式会社 | 炭化ケイ素焼結体及びその製造方法 |
| JPS60261164A (ja) * | 1984-06-07 | 1985-12-24 | Nippon Telegr & Teleph Corp <Ntt> | 溝型ｍｏｓキヤパシタの製法 |
-
1986
- 1986-10-17 JP JP15963686U patent/JPS6365250U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS605074A (ja) * | 1983-06-22 | 1985-01-11 | 日本タングステン株式会社 | 炭化ケイ素焼結体及びその製造方法 |
| JPS60261164A (ja) * | 1984-06-07 | 1985-12-24 | Nippon Telegr & Teleph Corp <Ntt> | 溝型ｍｏｓキヤパシタの製法 |